Industry Connections and Links:
- • KLA-Tencor Corporation, the makers of
PROLITH
(our research sponsor)
- •
On-line Lithography Glossary
, written by Chris Mack
- •
PROLITH Technical Papers
document over two decades of leading-edge research and development in lithography process optimization, using the PROLITH product line:
- o
PROLITH
Lithography Optimization tool
- o
ProBEAM
E-Beam Lithography Optimization tool
- o
ProDATA
Advanced CD Analysis
Reference:
- •
On-line Lithography Glossary
, written by Chris Mack
- •
PROLITH Technical Papers
document over two decades of leading-edge research and development in lithography process optimization, using the PROLITH product line:
- o
PROLITH
Lithography Optimization tool
- o
ProBEAM
E-Beam Lithography Optimization tool
- o
ProDATA
Advanced CD Analysis