Industry Connections and Links:

• KLA-Tencor Corporation, the makers of PROLITH (our research sponsor)
On-line Lithography Glossary , written by Chris Mack
PROLITH Technical Papers document over two decades of leading-edge research and development in lithography process optimization, using the PROLITH product line:
o PROLITH Lithography Optimization tool
o ProBEAM E-Beam Lithography Optimization tool
o ProDATA Advanced CD Analysis

Reference:

On-line Lithography Glossary , written by Chris Mack
PROLITH Technical Papers document over two decades of leading-edge research and development in lithography process optimization, using the PROLITH product line:
o PROLITH Lithography Optimization tool
o ProBEAM E-Beam Lithography Optimization tool
o ProDATA Advanced CD Analysis